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Journal of Vacuum Science and Technology
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Journal of Vacuum Science and Technology : ウィキペディア英語版
Journal of Vacuum Science and Technology

The name Journal of Vacuum Science and Technology (JVST) combines two scientific journals, ''JVST A'' and ''JVST B'', published by the American Vacuum Society since 1964.
==History==

*1964–1982 ''Journal of Vacuum Science and Technology''
*1983–present ''Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films''
*1983–1990 ''Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena''
*1991–present ''Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures''

抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)
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